Nanofabrication Laboratory (NFL) was initiated in Dec. 2018, with a ~1500 m2 clean-room of class 100 and class 1000 constructed in Sept. 2013. NLF fully equipped by diversified state-of-the-art fabrication facilities and characterization instrumentation, is a meeting point to support researchers both at home and abroad. The laboratory devotes innovative research efforts to interdisciplinary frontiers, key technologies and processes of fabrication, batchable production and their applications for novel nanostructures and nanodevices.
1. Nanosensors, and novel optical nanodevices and optical manipulation such as Pixelated micropolarizer arrays and Optical metasurfaces.
2. Novel nanofabrication technologies and processes: Nanostructures/devices with near-fabrication-limit dimensions, and insulating substrate-based nanostructures/devices.
3. Key integration technologies and applications of nanodevices/systems: Optical/electrical nanosensors, and Energy-related and optical nanodevices.