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Welcome to ourNCNST

Introduction ofNCNST

The National Center for Nanoscience and Technology(NCNST) of China is co-founded by Chinese Academy of Sciences (CAS) and Ministry of Education . It is a subsidiary non-profit organization of CAS which enjoys full financial allocations with a status of independent non-profit legal entity.

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Nanofabrication Laboratory

Nanofabrication Laboratory has a total clean-room area of over 400 m2 (about 100 m2 for class 100 and 300 m2 for class 1000) in which there are diversified state-of-the-art fabrication facilities and some characterization tools available. It is capable of processing various materials with a maximum size of 4 inch. As a public nanofabrication platform, this laboratory is accessible for the users of micro- and nano-technology.

Main facilities:

  • UV lithography
  • Electron beam lithography
  • Focused ion beam
  • Plasma-enhanced CVD, electron beam evaporators, DC and RF sputters, and furnaces with RTO and RTP
  • High density plasma ICP silicon etching system, metal etching system, and photoresist plasma ashing system,
  • Wet chemical processing benches
  • Profilometer, ellipsometer, optical microscope, Atomic force microscopy, Four-probe station, and high resolution SEM
  • Post processing tools with dicing tool and wire bonder

Research involved:

  • Fabrication of micro- and nano-structures for research in physics, chemistry, biology and new materials
  • Development of new processes in various materials
  • Multidisciplinary research on new micro- and nano- systems
  • Integration techniques of micro- and nano- systems

Copyright @2005-2008,     National Center for Nanoscience and Technology (NCNST)
No.11 ZhongGuanCun BeiYiTiao, 100190 Beijing, P.R. China
Tel:+8610-82545545    Fax:+8610-62656765    E-mail: webmaster@nanoctr.cn